DIY MEMS Fabricating Microelectromechanical Systems in Open Use Labs /

• Main Author: Munro, Deborah (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Subjects: Electronic circuits.; Electronics.; Microelectronics.; Biomedical engineering.; Nanotechnology.; Industrial engineering.; Production engineering.; Electronic Circuits and Devices.; Electronics and Microelectronics, Instrumentation.; Biomedical Engineering/Biotechnology.; Nanotechnology and Microengineering.; Industrial and Production Engineering.

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can qui...

Table of Contents:

• Introduction
• National Nanotechnology Coordinated Infrastructure (NNCI)
• Working in a Cleanroom
• MEMS Fabrication Process
• Equipment
• Tools and Supplies
• Designing for MEMS
• Soft Materials
• Imaging & Metrology
• Testing
• Transporting
• Regulatory Approval Pathways
• Locations of the Facilities
• Meet the Lab Directors
• Collaborating with a Facility
• International Options
• Intellectual Property
• Getting Project Assistance
• Costs
• Taking the First Steps.