Microsystems Mechanical Design

• Corporate Author: SpringerLink (Online service)
• Other Authors: Bona, Francesco De (Editor), Enikov, Eniko T. (Editor)
• Format: Electronic eBook
• Language: English
• Published: Vienna : Springer Vienna, 2006.
• Series: CISM International Centre for Mechanical Sciences, Courses and Lectures ; 478
• Subjects: Engineering.; Computational intelligence.; Fluid mechanics.; Engineering design.; Control engineering.; Robotics.; Mechatronics.; Electronics.; Microelectronics.; Engineering Design.; Computational Intelligence.; Engineering Fluid Dynamics.; Control, Robotics, Mechatronics.; Electronics and Microelectronics, Instrumentation.

Nowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in the...

Table of Contents:

• to Micro-Systems and to the Techniques for Their Fabrication
• Microstructures Under Electrostatic Loads: Discrete System Modelling
• Dynamics of Mechatronic Systems at Microscale
• Continuum Microstructures Loaded Electrostatically
• Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection
• Design of Compliant Micromechanisms
• Micro- and Nano-assembly and Manipulation Techniques for MEMS
• Microfluidics: Device Science and Technology.