APA (7th ed.) Citation

Nojiri, K. (2015). Dry Etching Technology for Semiconductors. Springer International Publishing : Imprint: Springer.

Chicago Style (17th ed.) Citation

Nojiri, Kazuo. Dry Etching Technology for Semiconductors. Cham: Springer International Publishing : Imprint: Springer, 2015.

MLA (8th ed.) Citation

Nojiri, Kazuo. Dry Etching Technology for Semiconductors. Springer International Publishing : Imprint: Springer, 2015.

Warning: These citations may not always be 100% accurate.