Dry Etching Technology for Semiconductors

Dry Etching Technology for Semiconductors

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which p...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας:	Nojiri, Kazuo (Συγγραφέας)
Συγγραφή απο Οργανισμό/Αρχή:	SpringerLink (Online service)
Μορφή:	Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:	English
Έκδοση:	Cham : Springer International Publishing : Imprint: Springer, 2015.
Θέματα:	Engineering. Semiconductors. Electronic circuits. Circuits and Systems. Electronic Circuits and Devices.
Διαθέσιμο Online:	Full Text via HEAL-Link

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