Dry Etching Technology for Semiconductors

• Κύριος συγγραφέας: Nojiri, Kazuo (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2015.
• Θέματα: Engineering.; Semiconductors.; Electronic circuits.; Circuits and Systems.; Electronic Circuits and Devices.

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits.  The author describes the device manufacturing flow, and explains in which p...

Πίνακας περιεχομένων:

• Contribution of Dry Etching Technology to Progress of Semiconductor Integrated Circuit
• Mechanism of Dry Etching
• Dry Etching of Various Materials
• Dry Etching Equipments
• Dry Etching Damage
• Latest Dry Etching Technologies
• Future Challenges and Outlook for Dry Etching Technology.