Dry Etching Technology for Semiconductors

• Main Author: Nojiri, Kazuo (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2015.
• Subjects: Engineering.; Semiconductors.; Electronic circuits.; Circuits and Systems.; Electronic Circuits and Devices.

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits.  The author describes the device manufacturing flow, and explains in which p...

Table of Contents:

• Contribution of Dry Etching Technology to Progress of Semiconductor Integrated Circuit
• Mechanism of Dry Etching
• Dry Etching of Various Materials
• Dry Etching Equipments
• Dry Etching Damage
• Latest Dry Etching Technologies
• Future Challenges and Outlook for Dry Etching Technology.