Nanopositioning Technologies Fundamentals and Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Edition: 1st ed. 2016.
• Subjects: Engineering.; Engineering design.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Electronics.; Microelectronics.; Nanotechnology and Microengineering.; Electronics and Microelectronics, Instrumentation.; Control, Robotics, Mechatronics.; Engineering Design.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...