Nanopositioning Technologies Fundamentals and Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Edition: 1st ed. 2016.
• Subjects: Engineering.; Engineering design.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Electronics.; Microelectronics.; Nanotechnology and Microengineering.; Electronics and Microelectronics, Instrumentation.; Control, Robotics, Mechatronics.; Engineering Design.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...

Table of Contents:

• 1.A review of Stick-Slip Nanopositioning Actuators
• 2. Piezoelectric Motor Technology - A Review
• 3.Design of High-speed Nanopositioning Systems
• 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism
• 5.Electro-magnetic Nano Positioning
• 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis
• 7. Tracking Control for Nanopositioning
• 8.Position Sensors for Nanopositioning
• 9. MEMS Nanopositioners
• 10.Control Issues of MEMS nanopositioning devices
• 11. A Review of Nanomanipulation in Scanning Electron Microscopes
• 12. Nanopositioning for lithography and data storage.