Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD /

• Main Author: Yanguas-Gil, Angel (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Series: SpringerBriefs in Materials,
• Subjects: Materials science.; Energy storage.; Nanochemistry.; Semiconductors.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Materials > Surfaces.; Materials Science.; Surfaces and Interfaces, Thin Films.; Surface and Interface Science, Thin Films.; Energy Storage.

This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...