Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD /
This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...
Main Author: | |
---|---|
Corporate Author: | |
Format: | Electronic eBook |
Language: | English |
Published: |
Cham :
Springer International Publishing : Imprint: Springer,
2017.
|
Series: | SpringerBriefs in Materials,
|
Subjects: | |
Online Access: | Full Text via HEAL-Link |
Table of Contents:
- Introduction
- Fundamentals of Gas Phase Transport on Nanostructured Materials
- Modeling Thin Film Growth on Nanostructured Materials
- Advanced Concepts.