Piezoelectric MEMS Resonators

• Corporate Author: SpringerLink (Online service)
• Other Authors: Bhugra, Harmeet (Editor), Piazza, Gianluca (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Series: Microsystems and Nanosystems,
• Subjects: Engineering.; Nanotechnology.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Electronics and Microelectronics, Instrumentation.; Nanotechnology and Microengineering.; Optical and Electronic Materials.

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research...

Table of Contents:

• AIN Thin Film Processing and Basic Properties
• Lead Zirconate Titanate (PZT) for M/NEMS
• Gallium Nitride for M/NEMS
• Lithium Niobate for M/NEMS Resonators
• Quality Factor and Coupling in Piezoelectric MEMS Resonators
• Flexural Piezoelectric Resonators
• Laterally Vibrating Piezoelectric MEMS Resonators
• BAW Piezoelectric Resonators
• Shear Piezoelectric MEMS Resonators
• Temperature Compensation of Piezo-MEMS Resonators
• Computational Modeling Challenges
• Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators
• Reliability and Quality Assessment (Stability and Packages)
• Large Volume Testing and Calibration
• High Frequency Oscillators for Mobile Devices
• BAW Filters and Duplexers for Mobile Communication. .