Nanofabrication Principles and Applications /

• Κύριος συγγραφέας: Papadopoulos, Christo (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Σειρά: SpringerBriefs in Materials,
• Θέματα: Materials science.; Nanoscale science.; Nanoscience.; Nanostructures.; Semiconductors.; Electronics.; Microelectronics.; Nanotechnology.; Materials Science.; Electronics and Microelectronics, Instrumentation.; Nanoscale Science and Technology.

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated...

Πίνακας περιεχομένων:

• Introduction
• Silicon Planar Processing and Photolithography
• Direct-write Lithography Approaches
• Stamping Methods
• Scanning-probe Methods
• Natural Lithography
• Direct-Growth and Self-assembly
• Practical Examples and Case Studies of Nanofabrication.