Nanofabrication Principles and Applications /

• Main Author: Papadopoulos, Christo (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Series: SpringerBriefs in Materials,
• Subjects: Materials science.; Nanoscale science.; Nanoscience.; Nanostructures.; Semiconductors.; Electronics.; Microelectronics.; Nanotechnology.; Materials Science.; Electronics and Microelectronics, Instrumentation.; Nanoscale Science and Technology.

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated...

Table of Contents:

• Introduction
• Silicon Planar Processing and Photolithography
• Direct-write Lithography Approaches
• Stamping Methods
• Scanning-probe Methods
• Natural Lithography
• Direct-Growth and Self-assembly
• Practical Examples and Case Studies of Nanofabrication.