Nanofabrication Principles, Capabilities and Limits /

• Κύριος συγγραφέας: Cui, Zheng (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Έκδοση: 2nd ed. 2017.
• Θέματα: Engineering.; Continuum mechanics.; Nanotechnology.; Electronic circuits.; Nanotechnology and Microengineering.; Continuum Mechanics and Mechanics of Materials.; Circuits and Systems.; Classical Electrodynamics.
• Φυσική περιγραφή: XVII, 432 p. 316 illus., 50 illus. in color. online resource.
• ISBN: 9783319393612

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.