Nanofabrication Principles, Capabilities and Limits /

• Main Author: Cui, Zheng (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Edition: 2nd ed. 2017.
• Subjects: Engineering.; Continuum mechanics.; Nanotechnology.; Electronic circuits.; Nanotechnology and Microengineering.; Continuum Mechanics and Mechanics of Materials.; Circuits and Systems.; Classical Electrodynamics.

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of...