Nanofabrication Principles, Capabilities and Limits /

• Κύριος συγγραφέας: Cui, Zheng (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Έκδοση: 2nd ed. 2017.
• Θέματα: Engineering.; Continuum mechanics.; Nanotechnology.; Electronic circuits.; Nanotechnology and Microengineering.; Continuum Mechanics and Mechanics of Materials.; Circuits and Systems.; Classical Electrodynamics.

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of...

Πίνακας περιεχομένων:

• 1. Introduction
• 2. Nanofabrication by Photons
• 3. Nanofabrication by Electron Beam
• 4. Nanofabrication by Ion Beam
• 5. Nanofabrication by Scanning Probes
• 6. Nanofabrication by Replication
• 7. Nanoscale Pattern Transfer by Etching
• 8. Nanoscale Pattern Transfer by Deposition
• 9. Indirect Nanofabrication
• 10. Nanofabrication by Self-Assembly
• 11. Applications of Nanofabrication Technologies.