Helium Ion Microscopy

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are di...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Άλλοι συγγραφείς: Hlawacek, Gregor (Επιμελητής έκδοσης), Gölzhäuser, Armin (Επιμελητής έκδοσης)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2016.
Σειρά:NanoScience and Technology,
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
LEADER 03022nam a22005655i 4500
001 978-3-319-41990-9
003 DE-He213
005 20161004060720.0
007 cr nn 008mamaa
008 161004s2016 gw | s |||| 0|eng d
020 |a 9783319419909  |9 978-3-319-41990-9 
024 7 |a 10.1007/978-3-319-41990-9  |2 doi 
040 |d GrThAP 
050 4 |a QC450-467 
050 4 |a QC718.5.S6 
072 7 |a PNFS  |2 bicssc 
072 7 |a PDND  |2 bicssc 
072 7 |a SCI078000  |2 bisacsh 
082 0 4 |a 621.36  |2 23 
245 1 0 |a Helium Ion Microscopy  |h [electronic resource] /  |c edited by Gregor Hlawacek, Armin Gölzhäuser. 
264 1 |a Cham :  |b Springer International Publishing :  |b Imprint: Springer,  |c 2016. 
300 |a XXIII, 526 p. 320 illus., 204 illus. in color.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
347 |a text file  |b PDF  |2 rda 
490 1 |a NanoScience and Technology,  |x 1434-4904 
520 |a This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content. 
650 0 |a Physics. 
650 0 |a Surfaces (Physics). 
650 0 |a Interfaces (Physical sciences). 
650 0 |a Thin films. 
650 0 |a Spectroscopy. 
650 0 |a Microscopy. 
650 0 |a Nanotechnology. 
650 0 |a Materials  |x Surfaces. 
650 1 4 |a Physics. 
650 2 4 |a Spectroscopy and Microscopy. 
650 2 4 |a Surfaces and Interfaces, Thin Films. 
650 2 4 |a Surface and Interface Science, Thin Films. 
650 2 4 |a Nanotechnology and Microengineering. 
700 1 |a Hlawacek, Gregor.  |e editor. 
700 1 |a Gölzhäuser, Armin.  |e editor. 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer eBooks 
776 0 8 |i Printed edition:  |z 9783319419886 
830 0 |a NanoScience and Technology,  |x 1434-4904 
856 4 0 |u http://dx.doi.org/10.1007/978-3-319-41990-9  |z Full Text via HEAL-Link 
912 |a ZDB-2-CMS 
950 |a Chemistry and Materials Science (Springer-11644)