Piezoresistive Effect of p-Type Single Crystalline 3C-SiC Silicon Carbide Mechanical Sensors for Harsh Environments /

• Main Author: Phan, Hoang-Phuong (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Series: Springer Theses, Recognizing Outstanding Ph.D. Research,
• Subjects: Materials science.; Solid state physics.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Materials Science.; Optical and Electronic Materials.; Electronics and Microelectronics, Instrumentation.; Solid State Physics.

This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline S...

Table of Contents:

• Introduction and Literature Review
• Theory of the Piezoresistive Effect in p-type 3C-Sic
• 3C-Sic Film Growth and Sample Preparation
• Characterization of the Piezoresistive Effect in p-type Single Crystalline 3C-Sic
• The Piezoresistive Effect in p-type Nanocrystalline Sic
• The Piezoresistive Effect of Top Down p-type 3C-Sic Nanowires
• Conclusion and Future Work.