Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets

• Main Author: Pampillón Arce, María Ángela (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Series: Springer Theses, Recognizing Outstanding Ph.D. Research,
• Subjects: Physics.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Electronic circuits.; Nanotechnology.; Surface and Interface Science, Thin Films.; Electronic Circuits and Devices.; Nanotechnology and Microengineering.

This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets. It demonstrates the possibility of depositing high permittivity materials (GdScO3) by means...

Table of Contents:

• Introduction
• Fabrication Techniques
• Characterization Techniques
• Thermal Oxidation of Gd2o3
• Plasma Oxidation of Gd2o3 and Sc2o3
• Gadolinium Scandate
• Interface Scavenging
• Gd2o3 on Inp Substrates
• Conclusions and Future Work.