Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /

• Main Authors: Claeys, Cor (Author, http://id.loc.gov/vocabulary/relators/aut), Simoen, Eddy (http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2018.
• Edition: 1st ed. 2018.
• Series: Springer Series in Materials Science, 270
• Subjects: Optical materials.; Electronic materials.; Microwaves.; Optical engineering.; Semiconductors.; Electronic circuits.; Materials science.; Optical and Electronic Materials.; Microwaves, RF and Optical Engineering.; Electronic Circuits and Devices.; Characterization and Evaluation of Materials.
• Physical Description: XXXIII, 438 p. 215 illus., 207 illus. in color. online resource.
• ISBN: 9783319939254
• ISSN: 0933-033X ;
• DOI: 10.1007/978-3-319-93925-4

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on the electrical device performance. Several control and possible gettering approaches are addressed. The book is a reference for researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. It has an interdisciplinary nature by combining different disciplines such as material science, defect engineering, device processing, defect and device characterization and device physics and engineering.