High Dielectric Constant Materials VLSI MOSFET Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Huff, H.R (Editor), Gilmer, D.C (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
• Series: Springer Series in Advanced Microelectronics, 16
• Subjects: Materials science.; Condensed matter.; Engineering.; Optical materials.; Electronic materials.; Materials > Surfaces.; Thin films.; Materials Science.; Optical and Electronic Materials.; Condensed Matter Physics.; Surfaces and Interfaces, Thin Films.; Engineering, general.

Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their i...