Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

• Main Author: Frühauf, Joachim (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
• Subjects: Materials science.; Chemical engineering.; Microwaves.; Optical engineering.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Materials Science.; Optical and Electronic Materials.; Electronics and Microelectronics, Instrumentation.; Ceramics, Glass, Composites, Natural Methods.; Microwaves, RF and Optical Engineering.; Industrial Chemistry/Chemical Engineering.

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use...

Table of Contents:

• Technological Basis of Bulk-Silicon-Microtechnique
• Orientation Dependent Etching of Silicon
• General Overview of the Shape- and Functional Elements and the Procedure of their Design
• Simple Shape Elements
• Elements for Mechanical Applications
• Elements for Fluidic Applications
• Elements for Optical Applications.