Gettering Defects in Semiconductors

• Κύριοι συγγραφείς: Perevoschikov, Victor A. (Συγγραφέας), Skoupov, Vladimir D. (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
• Σειρά: Springer Series in Advanced Microelectronics, 19
• Θέματα: Materials science.; Chemical engineering.; Optical materials.; Electronic materials.; Materials Science.; Optical and Electronic Materials.; Industrial Chemistry/Chemical Engineering.

Gettering Defects in Semiconductors fulfills three basic purposes: – to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; – to identify new directions in research, particularly to enhance the perspective of professionals and y...

Πίνακας περιεχομένων:

• Basic technological processes and defect formation in the components of device structures
• Effects of defects on electrophysical and functional parameters in semiconducting structures and devices
• Techniques for high-temperature gettering
• Physical foundations for low-temperature gettering techniques.