Gettering Defects in Semiconductors
Gettering Defects in Semiconductors fulfills three basic purposes: – to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; – to identify new directions in research, particularly to enhance the perspective of professionals and y...
Κύριοι συγγραφείς: | , |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2005.
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Σειρά: | Springer Series in Advanced Microelectronics,
19 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Basic technological processes and defect formation in the components of device structures
- Effects of defects on electrophysical and functional parameters in semiconducting structures and devices
- Techniques for high-temperature gettering
- Physical foundations for low-temperature gettering techniques.