Gettering Defects in Semiconductors
Gettering Defects in Semiconductors fulfills three basic purposes: – to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; – to identify new directions in research, particularly to enhance the perspective of professionals and y...
| Main Authors: | , |
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| Corporate Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2005.
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| Series: | Springer Series in Advanced Microelectronics,
19 |
| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
Table of Contents:
- Basic technological processes and defect formation in the components of device structures
- Effects of defects on electrophysical and functional parameters in semiconducting structures and devices
- Techniques for high-temperature gettering
- Physical foundations for low-temperature gettering techniques.