Gettering Defects in Semiconductors

• Main Authors: Perevoschikov, Victor A. (Author), Skoupov, Vladimir D. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
• Series: Springer Series in Advanced Microelectronics, 19
• Subjects: Materials science.; Chemical engineering.; Optical materials.; Electronic materials.; Materials Science.; Optical and Electronic Materials.; Industrial Chemistry/Chemical Engineering.

Gettering Defects in Semiconductors fulfills three basic purposes: – to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; – to identify new directions in research, particularly to enhance the perspective of professionals and y...

Table of Contents:

• Basic technological processes and defect formation in the components of device structures
• Effects of defects on electrophysical and functional parameters in semiconducting structures and devices
• Techniques for high-temperature gettering
• Physical foundations for low-temperature gettering techniques.