Gettering Defects in Semiconductors
Gettering Defects in Semiconductors fulfills three basic purposes: – to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; – to identify new directions in research, particularly to enhance the perspective of professionals and y...
| Κύριοι συγγραφείς: | , |
|---|---|
| Συγγραφή απο Οργανισμό/Αρχή: | |
| Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2005.
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| Σειρά: | Springer Series in Advanced Microelectronics,
19 |
| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
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