Micromechanical Photonics
The purpose of this book is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics through not only theoretical and experimental results, but also by describing various products and their f...
| Main Author: | Ukita, Hiroo (Author) |
|---|---|
| Corporate Author: | SpringerLink (Online service) |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2006.
|
| Series: | Microtechnology and Mems,
|
| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
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