Micromechanical Photonics

The purpose of this book is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics through not only theoretical and experimental results, but also by describing various products and their f...

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Bibliographic Details
Main Author: Ukita, Hiroo (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2006.
Series:Microtechnology and Mems,
Subjects:
Online Access:Full Text via HEAL-Link
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by Ukita, Hiroo
Published 2006
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