Micromechanical Photonics
The purpose of this book is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics through not only theoretical and experimental results, but also by describing various products and their f...
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| Format: | Electronic eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
2006.
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| Series: | Microtechnology and Mems,
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| Online Access: | Full Text via HEAL-Link |
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