MEMS: A Practical Guide to Design, Analysis, and Applications

• Corporate Author: SpringerLink (Online service)
• Other Authors: Korvink, Jan G. (Editor), Paul, Oliver (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2006.
• Subjects: Engineering.; Microwaves.; Optical engineering.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Microwaves, RF and Optical Engineering.

MEMS are rapidly moving from the research laboratory to the mar­ ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group ex...

Table of Contents:

• Microtransducer Operation
• Material Properties: Measurement and Data
• MEMS and NEMS Simulation
• System-Level Simulation of Microsystems
• Thermal-Based Microsensors
• Photon Detectors
• Free-Space Optical MEMS
• Integrated Micro-Optics
• Microsensors for Magnetic Fields
• Mechanical Microsensors
• Semiconductor-Based Chemical Microsensors
• Microfluidics
• Biomedical Systems
• Microactuators
• Micromachining Technology
• LIGA Technology for R&D and Industrial Applications
• 17 Interface Circuitry and Microsystems.