Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models /

• Main Authors: Bechtold, Tamara (Author), Rudnyi, Evgenii B. (Author), Korvink, Jan G. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2007.
• Subjects: Engineering.; Mechanics.; Electronics.; Microelectronics.; Electronic circuits.; Circuits and Systems.; Electronics and Microelectronics, Instrumentation.; Engineering, general.

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level....

Table of Contents:

• Dynamic Electro-thermal Simulation of Microsystems
• Overview of Linear Model Order Reduction
• Selected Model Reduction Software
• Application of Model Reduction to Electro-thermal MEMS
• Advanced Development
• References.