Rare Earth Oxide Thin Films

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Fanciulli, Marco (Επιμελητής έκδοσης), Scarel, Giovanna (Επιμελητής έκδοσης)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg, 2007.
• Σειρά: Topics in Applied Physics, 106
• Θέματα: Physics.; Condensed matter.; Engineering.; Optical materials.; Electronic materials.; Materials > Surfaces.; Thin films.; Physics, general.; Optical and Electronic Materials.; Surfaces and Interfaces, Thin Films.; Condensed Matter Physics.; Engineering, general.

Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface wit...

Πίνακας περιεχομένων:

• Introduction
• ALD, MOCVD, and MBE deposition of rare earth oxides. - Requirements of precursor for MOCVD and ALD of rare earth oxides
• Models for ALD and MOCVD growth of rare earth oxides
• Growth of oxides with complex stoichiometry by ALD, e.g. La1-xCaxMnO3
• Fabrication and characterization of rare earth scandate thin films prepared by pulsed laser deposition
• Film and interface layer composition of rare earth (Lu, Yb) oxides deposited by ALD
• Local atomic environment of high-k oxides on silicon probed by X-ray absorption spectroscopy, and advanced transmission electron microscopy techniques (TEM-EELS)
• Strain-relief at internal dielectric interfaces in high-k gate stacks with transition metal and rare earth atom oxide dielectrics
• Electrical characterization of rare earth oxides grown by ALD
• Dielectric properties of rare-earth oxides: general trends from theory
• Charge traps in high-k dielectrics: ab initio study of defects in Pr-based materials
• Experimental determination of the band offset of rare earth oxides on various semiconductors
• Band edge electronic structure, and band offsets of transition metal/rare earth oxide dielectrics
• Rare earth oxides in microelectronics
• Requirements of oxides as gate dielectrics for CMOS devices, and ultimate scaling
• The magneto-electric properties of RMnO compounds
• Sesquioxides as host materials for rare-earth-doped bulk lasers and active waveguides.