Scanning Electron Microscopy Physics of Image Formation and Microanalysis /

• Main Author: Reimer, Ludwig (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1998.
• Edition: 2nd ed. 1998.
• Series: Springer Series in Optical Sciences, 45
• Subjects: Spectroscopy.; Microscopy.; Solid state physics.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Physics.; Spectroscopy and Microscopy.; Solid State Physics.; Surface and Interface Science, Thin Films.; Physics, general.

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling...

Table of Contents:

• Electron Optics of a Scanning Electron Microscope
• Electron Scattering and Diffusion
• Emission of Backscattered and Secondary Electrons
• Electron Detectors and Spectrometers
• Image Contrast and Signal Processing
• Electron-Beam-Induced Current and Cathodoluminescence
• Special Techniques in SEM
• Crystal Structure Analysis by Diffraction
• Elemental Analysis and Imaging with X-Rays.