Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Behrisch, Rainer (Editor), Eckstein, Wolfgang (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2007.
• Series: Topics in Applied Physics, 110
• Subjects: Materials science.; Atoms.; Physics.; Matter.; Plasma (Ionized gases).; Materials > Surfaces.; Thin films.; Materials Science.; Surfaces and Interfaces, Thin Films.; Atoms and Molecules in Strong Fields, Laser Matter Interaction.; Plasma Physics.

This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and...

Table of Contents:

• and Overview
• Computer Simulation of the Sputtering Process
• Sputtering Yields
• Results of Molecular Dynamics Calculations
• Energy and Angular Distributions of Sputtered Species
• Chemical Sputtering
• Electronic Sputtering with Swift Heavy Ions.