Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies /
This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and...
Συγγραφή απο Οργανισμό/Αρχή: | |
---|---|
Άλλοι συγγραφείς: | , |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2007.
|
Σειρά: | Topics in Applied Physics,
110 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- and Overview
- Computer Simulation of the Sputtering Process
- Sputtering Yields
- Results of Molecular Dynamics Calculations
- Energy and Angular Distributions of Sputtered Species
- Chemical Sputtering
- Electronic Sputtering with Swift Heavy Ions.