High-Resolution X-Ray Scattering from Thin Films and Multilayers

• Main Authors: Holy, Vaclav (Author, http://id.loc.gov/vocabulary/relators/aut), Pietsch, Ullrich (http://id.loc.gov/vocabulary/relators/aut), Baumbach, Tilo (http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1999.
• Edition: 1st ed. 1999.
• Series: Springer Tracts in Modern Physics, 149
• Subjects: Lasers.; Photonics.; Materials-Surfaces.; Thin films.; Crystallography.; Optics, Lasers, Photonics, Optical Devices.; Surfaces and Interfaces, Thin Films.; Crystallography and Scattering Methods.
• Physical Description: XI, 258 p. 140 illus. online resource.
• ISBN: 9783540496250
• ISSN: 0081-3869 ;
• DOI: 10.1007/BFb0109385

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.