High-Resolution X-Ray Scattering from Thin Films and Multilayers
This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dy...
Κύριοι συγγραφείς: | , , |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
1999.
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Έκδοση: | 1st ed. 1999. |
Σειρά: | Springer Tracts in Modern Physics,
149 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Basic elements of the equipment
- Diffractometers and reflectometers
- Scans and resolution in angular and reciprocal space
- Basic principles
- Kinematical scattering theory
- Dynamical scattering theory
- Layer thicknesses of single layers and multilayers
- Lattice parameters and lattice strains in single expitaxial layers
- Volume defects in layers
- X-ray reflection by rough multilayers
- X-ray scattering by gratings and dots
- A. Wave vectors and amplitudes of the internal wavefields in a dynamically scattering crystal.