Microstructuring of Glasses
As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications...
| Main Authors: | Hülsenberg, Dagmar (Author), Harnisch, Alf (Author), Bismarck, Alexander (Author) |
|---|---|
| Corporate Author: | SpringerLink (Online service) |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2008.
|
| Series: | Springer Series in Materials Science,
87 |
| Subjects: | |
| Online Access: | Full Text via HEAL-Link |
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