CMOS Hotplate Chemical Microsensors

• Main Authors: Graf, Markus (Author), Barrettino, Diego (Author), Baltes, Henry P. (Author), Hierlemann, Andreas (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2007.
• Series: Microtechnology and MEMS,
• Subjects: Engineering.; Physical chemistry.; Optical materials.; Electronic materials.; Engineering, general.; Physical Chemistry.; Optical and Electronic Materials.

This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microf...

Table of Contents:

• Miniaturized Metal-Oxide Sensors
• Thermal Modelling of CMOS Microhotplates
• Microhotplates in CMOS Technology
• Monolithic Gas Sensor Systems
• Microsensor Arrays
• Conclusion and Outlook.