CMOS Hotplate Chemical Microsensors
This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microf...
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Bibliographic Details
Main Authors: |
Graf, Markus
(Author),
Barrettino, Diego
(Author),
Baltes, Henry P.
(Author),
Hierlemann, Andreas
(Author) |
Corporate Author: |
SpringerLink (Online service) |
Format: | Electronic
eBook
|
Language: | English |
Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2007.
|
Series: | Microtechnology and MEMS,
|
Subjects: | |
Online Access: | Full Text via HEAL-Link
|