SpringerLink (Online service), Depla, D., & Mahieu, S. (2008). Reactive Sputter Deposition. Springer Berlin Heidelberg.
Chicago Style (17th ed.) CitationSpringerLink (Online service), Diederik Depla, and Stijn Mahieu. Reactive Sputter Deposition. Berlin, Heidelberg: Springer Berlin Heidelberg, 2008.
MLA (8th ed.) CitationSpringerLink (Online service), et al. Reactive Sputter Deposition. Springer Berlin Heidelberg, 2008.
Warning: These citations may not always be 100% accurate.