APA (7th ed.) Citation

Franz, G. (2009). Low Pressure Plasmas and Microstructuring Technology. Springer Berlin Heidelberg.

Chicago Style (17th ed.) Citation

Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. Berlin, Heidelberg: Springer Berlin Heidelberg, 2009.

MLA (8th ed.) Citation

Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. Springer Berlin Heidelberg, 2009.

Warning: These citations may not always be 100% accurate.