Low Pressure Plasmas and Microstructuring Technology

• Main Author: Franz, Gerhard (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2009.
• Subjects: Materials science.; Atomic structure.; Molecular structure.; Spectra.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Materials > Surfaces.; Thin films.; Materials Science.; Optical and Electronic Materials.; Electronics and Microelectronics, Instrumentation.; Surfaces and Interfaces, Thin Films.; Atomic/Molecular Structure and Spectra.

This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...

Table of Contents:

• Collisions and cross sections
• The plasma
• DC discharges
• High-frequency discharges I
• High-frequency discharges II
• High-frequency discharges III
• Ion beam systems
• Plasma diagnostics
• Plasma deposition processes
• Plasma etch processes
• Etch Mechanisms
• Outlook
• Advanced Topics.