Handbook of Thin-Film Technology

• Corporate Author: SpringerLink (Online service)
• Other Authors: Frey, Hartmut (Editor), Khan, Hamid R. (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
• Edition: 1.
• Subjects: Materials science.; Physical chemistry.; Optical materials.; Electronic materials.; Nanotechnology.; Tribology.; Corrosion and anti-corrosives.; Coatings.; Materials > Surfaces.; Thin films.; Materials Science.; Surfaces and Interfaces, Thin Films.; Characterization and Evaluation of Materials.; Tribology, Corrosion and Coatings.; Physical Chemistry.; Optical and Electronic Materials.

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical...

Table of Contents:

• Applications and developments of thin film technology
• Importance of the vacuum technology for thin film coatings
• Evaporation in the vacuum
• Basic principle of plasma physics
• Gaseous phase and surface processes
• Coating by cathode sputtering
• Plasma treatment methods
• Ion beam-supported procedures
• Chemical Vapor Deposition (CVD)
• Physical basics of modern methods of surface and thin film analysis
• Measurements of thin layers during the coating
• Measurements of thin layers after terminated coating process
• Nanoparticle Films
• Optical properties of thin films.