Design and Manufacturing of Active Microsystems

• Corporate Author: SpringerLink (Online service)
• Other Authors: Büttgenbach, Stephanus (Editor), Burisch, Arne (Editor), Hesselbach, Jürgen (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
• Series: Microtechnology and MEMS,
• Subjects: Engineering.; Nanotechnology.; Mechatronics.; Industrial engineering.; Nanotechnology and Microengineering.; Operating Procedures, Materials Treatment.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The...