Design and Manufacturing of Active Microsystems

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Büttgenbach, Stephanus (Επιμελητής έκδοσης), Burisch, Arne (Επιμελητής έκδοσης), Hesselbach, Jürgen (Επιμελητής έκδοσης)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
• Σειρά: Microtechnology and MEMS,
• Θέματα: Engineering.; Nanotechnology.; Mechatronics.; Industrial engineering.; Nanotechnology and Microengineering.; Operating Procedures, Materials Treatment.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The...

Πίνακας περιεχομένων:

• 1. Introduction
• 2. Design and Construction
• 3. Guiding and Measuring in Active Microsystems
• 4. Manufacturing and Fabrication
• 5. Microassembly
• 6.Industrial Applications.