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02947nam a22005535i 4500 |
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978-3-642-15868-1 |
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DE-He213 |
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20151125193637.0 |
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cr nn 008mamaa |
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110302s2011 gw | s |||| 0|eng d |
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|a 9783642158681
|9 978-3-642-15868-1
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|a 10.1007/978-3-642-15868-1
|2 doi
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|d GrThAP
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|a T174.7
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|a TEC027000
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|a 620.5
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|a Semiconductor-On-Insulator Materials for Nanoelectronics Applications
|h [electronic resource] /
|c edited by Alexei Nazarov, J.-P. Colinge, Francis Balestra, Jean-Pierre Raskin, Francisco Gamiz, V.S. Lysenko.
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|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg,
|c 2011.
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|a IX, 447 p.
|b online resource.
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
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|a text file
|b PDF
|2 rda
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|a Engineering Materials,
|x 1612-1317
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|a New semiconductor-on-insulator materials -- Physics of modern SemOI devices -- Diagnostics of the SOI devices -- Sensors and MEMS on SOI.
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|a "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
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|a Engineering.
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|a Semiconductors.
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|a Nanotechnology.
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|a Materials science.
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|a Engineering.
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|a Nanotechnology and Microengineering.
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|a Nanotechnology.
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|a Semiconductors.
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|a Characterization and Evaluation of Materials.
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1 |
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|a Nazarov, Alexei.
|e editor.
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1 |
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|a Colinge, J.-P.
|e editor.
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1 |
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|a Balestra, Francis.
|e editor.
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1 |
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|a Raskin, Jean-Pierre.
|e editor.
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1 |
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|a Gamiz, Francisco.
|e editor.
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700 |
1 |
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|a Lysenko, V.S.
|e editor.
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710 |
2 |
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|a SpringerLink (Online service)
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|t Springer eBooks
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776 |
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|i Printed edition:
|z 9783642158674
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830 |
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|a Engineering Materials,
|x 1612-1317
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856 |
4 |
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|u http://dx.doi.org/10.1007/978-3-642-15868-1
|z Full Text via HEAL-Link
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912 |
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|a ZDB-2-CMS
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|a Chemistry and Materials Science (Springer-11644)
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