Microsystems and Nanotechnology
“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest adv...
Συγγραφή απο Οργανισμό/Αρχή: | |
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Άλλοι συγγραφείς: | , , |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2012.
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Part 1.The Fundamentals of Microsystems and Nanotechnology.- Information Electronics Of Nano-era
- Micro/Nano Fluidics
- Materials Problems in MEMS
- Nanomechanics in Crossed Multidiscipline
- Nano Structure and Monomolecular Electronic Transport Feature
- Nanomaterials structural Analysis and Attribute
- Part 2.Microsystems
- MEMS Introduction
- Micro Electromechanical Sensor
- Microactuator
- MEMS Design
- MEMS Processing and Fabrication Techniques and Technology
- Optical MEMS and Nano-Photonics
- Introduction of MEMS Packaging
- Part 3.Nanotechnology.- Nanotube , Nanoware , Nanobelt
- Semiconductor NanoCrystal-- Quantum Dot ,Quantum Wire, Quantum Rod
- The Application of STM and AFM in Nano Process and Fabrication
- Nanoscale Fabrication
- Integration Nanotechnology based on MEMS Manufacture Technology
- Part 4.Microsystems and Nanotechnology Application
- MEMS Application
- Micro-electromechanical Sensor System
- A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry
- MEMS in Automobile
- Biochips
- Nanotechnology in Biological and Medical Applications
- Part 5.Development and Prospect
- Development and Prospect.