Introduction to Microsystem Design

• Main Author: Schomburg, Werner Karl (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
• Series: RWTHedition, 1
• Subjects: Engineering.; Physics.; Nanotechnology.; Electronic circuits.; Optical materials.; Electronic materials.; Nanotechnology and Microengineering.; Optical and Electronic Materials.; Applied and Technical Physics.; Circuits and Systems.

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...

Table of Contents:

• Preface
• Notations and symbols
• Introduction
• Scaling Laws
• Elastic deformations
• Thin Films
• Conductor Paths
• Membranes
• Strain gauges on membranes
• Beams
• Vibrations
• Capillaries
• Capacitive forces
• Piezoelectric effect
• Thermal actuators
• Micro optics
• Diffusion
• Micro valves
• Micro pumps
• Micro dosing
• Analogies between physical domains
• Mechanical devices for electronics
• Pressure sensors
• Flow sensors
• Inertial sensors.