Photomodulated Optical Reflectance A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon /
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it su...
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| Format: | Electronic eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2012.
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| Series: | Springer Theses, Recognizing Outstanding Ph.D. Research,
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| Online Access: | Full Text via HEAL-Link |
