Photomodulated Optical Reflectance A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon /

• Main Author: Bogdanowicz, Janusz (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2012.
• Series: Springer Theses, Recognizing Outstanding Ph.D. Research,
• Subjects: Physics.; Semiconductors.; Applied and Technical Physics.

One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it su...

Table of Contents:

• Theory of Perturbation of the Reflectance
• Theory of Perturbation of the Refractive Index
• Theory of Carrier and Heat Transport in Homogeneously Doped Silicon
• Extension of the Transport Theory to Ultra-Shallow Doped Silicon Layers
• Assessment of the Model
• Application of the Model to Carrier Profling.