Micro-Nanorobotic Manipulation Systems and Their Applications

Micro/Nano Robotics and Automation technologies have rapidly grown associated with the growth of Micro and Nanotechnologies. This book presents a summary of fundamentals in micro-nano scale engineering and the current state of the art of these technologies. “Micro-Nanorobotic Manipulation Systems an...

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Bibliographic Details
Main Authors: Fukuda, Toshio (Author), Arai, Fumihito (Author), Nakajima, Masahiro (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Subjects:
Online Access:Full Text via HEAL-Link
Table of Contents:
  • Introduction of Micro-Nanorobotic Manipulation Systems
  • Physics in Micro-Nano Scale
  • Basics of Micro-Nanorobotic Manipulation Systems
  • Micromanipulation System under Optical Microscope
  • Applications of Micromanipulation System under Optical Microscope
  • Nanomanipulation System under Electron Microscopes
  • Applications of Nanomanipulation System under FE-SEM-TEM
  • Applications of Nanomanipulation System under E-SEM.