High Permittivity Gate Dielectric Materials

• Corporate Author: SpringerLink (Online service)
• Other Authors: Kar, Samares (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
• Series: Springer Series in Advanced Microelectronics, 43
• Subjects: Engineering.; Solid state physics.; Spectroscopy.; Microscopy.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Solid State Physics.; Spectroscopy and Microscopy.; Engineering, general.

"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, me...