Nano-tribology and Materials in MEMS

• Corporate Author: SpringerLink (Online service)
• Other Authors: Sinha, Sujeet K. (Editor), Satyanarayana, N. (Editor), Lim, Seh Chun (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
• Subjects: Engineering.; Nanotechnology.; Mechatronics.; Tribology.; Corrosion and anti-corrosives.; Coatings.; Nanotechnology and Microengineering.; Tribology, Corrosion and Coatings.

 This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed. 

 Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS -- Nanofriction by Reciprocating Sliding -- The structure and tribological behaviors of nanostructure thin films -- Detection of lateral forces and formation of atomic chains -- Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects -- Microfabricated sleds for friction studies -- Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications -- A Novel Method of Lubrication of Micro-Electro-Mechanical Systems -- Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS -- Lubrication of High Sliding MEMS -- Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant -- Probing the complexities of Friction in submicron contacts between two pristine surfaces -- Atomistic Simulation of Polymer Nanotribology -- Simulation of frictional behavior of polymer-on-polymer sliding -- Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications.