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03344nam a22005055i 4500 |
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978-3-642-36935-3 |
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|a 9783642369353
|9 978-3-642-36935-3
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|a 10.1007/978-3-642-36935-3
|2 doi
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|a 620.5
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|a Nano-tribology and Materials in MEMS
|h [electronic resource] /
|c edited by Sujeet K. Sinha, N. Satyanarayana, Seh Chun Lim.
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|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg :
|b Imprint: Springer,
|c 2013.
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|a VIII, 275 p. 157 illus., 89 illus. in color.
|b online resource.
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|a text
|b txt
|2 rdacontent
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|a computer
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|a online resource
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|a Formation of arrayed Au nanoparticles on SiO2/Si substrate by use of dewetting phenomenon: An example of bottom-up technologies in MEMS -- Nanofriction by Reciprocating Sliding -- The structure and tribological behaviors of nanostructure thin films -- Detection of lateral forces and formation of atomic chains -- Reducing friction force on silicon surface using submicron- to atomic-scale geometry effects -- Microfabricated sleds for friction studies -- Vapor Phase Lubrication-Nanotribology Fundamentals and MEMS Applications -- A Novel Method of Lubrication of Micro-Electro-Mechanical Systems -- Robust Tribological Solutions for Silicon and Polymer Based MEMS/NEMS -- Lubrication of High Sliding MEMS -- Pre-modifications of Si surface to enhance the wear durability of PFPE nano-lubricant -- Probing the complexities of Friction in submicron contacts between two pristine surfaces -- Atomistic Simulation of Polymer Nanotribology -- Simulation of frictional behavior of polymer-on-polymer sliding -- Fundamentals of friction and wear mechanisms at loads relevant to MEMS applications.
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|a This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.
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|a Engineering.
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|a Nanotechnology.
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|a Mechatronics.
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|a Tribology.
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|a Corrosion and anti-corrosives.
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|a Coatings.
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|a Engineering.
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|a Nanotechnology and Microengineering.
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|a Tribology, Corrosion and Coatings.
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|a Mechatronics.
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|a Sinha, Sujeet K.
|e editor.
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|a Satyanarayana, N.
|e editor.
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|a Lim, Seh Chun.
|e editor.
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|a SpringerLink (Online service)
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|t Springer eBooks
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|i Printed edition:
|z 9783642369346
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|u http://dx.doi.org/10.1007/978-3-642-36935-3
|z Full Text via HEAL-Link
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|a ZDB-2-ENG
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|a Engineering (Springer-11647)
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