Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers /

• Main Author: Reichel, Denise (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer, 2015.
• Edition: 1st ed. 2015.
• Series: MatWerk
• Subjects: Physics.; Thermodynamics.; Solid state physics.; Engineering > Materials.; Solid State Physics.; Materials Engineering.

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...

Table of Contents:

• Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing
• Concept of ripple pyrometry during  flash lamp annealing
•  Ripple pyrometry for flash lamp annealing.- Experiments – ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.