Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers /

• Κύριος συγγραφέας: Reichel, Denise (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer, 2015.
• Έκδοση: 1st ed. 2015.
• Σειρά: MatWerk
• Θέματα: Physics.; Thermodynamics.; Solid state physics.; Engineering > Materials.; Solid State Physics.; Materials Engineering.

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...

Πίνακας περιεχομένων:

• Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing
• Concept of ripple pyrometry during  flash lamp annealing
•  Ripple pyrometry for flash lamp annealing.- Experiments – ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.